Research

Efficient Patch-Based Anomaly Detection Fused with Diffusion Driven Generative Modeling for Semiconductor Wafer Bin Map Open Set Anomaly Detection

Single source1 source8 Oct 2026

arXiv:2610.09993v1 Announce Type: cross Abstract: Spatial defect signatures on wafer bin maps (WBMs) trace yield loss to specific process faults, yet supervised classifiers recognize only the defect types seen during training, and one-class detectors built on

Reported by 1 source

arxiv.orghttps://arxiv.org/abs/2610.09993

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